New Fabrication Process of Monolithic Probes with Integrated Heaters for Nano-thermo-mechanical Writing

Conference paper

Chi-Han Chiou, Shang-Jen Chang, Gwo-Bin Lee and Huei-Huang Lee

第四屆精密機械製造研討會第四屆精密機械製造研討會

2004

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Title: New Fabrication Process of Monolithic Probes with Integrated Heaters for Nano-thermo-mechanical Writing
Creators - without role: Chi-Han Chiou
Shang-Jen Chang
Gwo-Bin Lee - 國立清華大學工學院動力機械工程學系
Huei-Huang Lee
Publication Details: 第四屆精密機械製造研討會第四屆精密機械製造研討會
Identifiers: 9957777274606774
Academic Unit: Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper