New Residual Stress Measurement in Textured Thin Film by Grazing Incidence X-ray Diffraction

$New Residual Stress Measurement in Textured Thin Film by Grazing Incidence X-ray Diffraction$

Conference paper

C.-H. Ma, J.-H. Huang and Haydn Chen

29th International Conference on Metallurgical Coatings and Thin Films 29th International Conference on Metallurgical Coatings and Thin Films

2002

Abstract

New Residual Stress Measurement;Textured Thin Film;Grazing Incidence X-ray Diffraction

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Title: New Residual Stress Measurement in Textured Thin Film by Grazing Incidence X-ray Diffraction
Creators - without role: C.-H. Ma
J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
Haydn Chen
Publication Details: 29th International Conference on Metallurgical Coatings and Thin Films 29th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957777118806774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper