Abstract
This study designs and realizes a novel bow-shape transmission springs for piezoelectric MEMS micromirror with 180-degrees optical scanning angle at 8.7 kHz scanning frequency (under atmosphere condition), which is the first micromirror to achieve this specification among the published works. Merits of this study are, (1) bow-shape transmission springs: bow-shape transmission springs could mitigate the maximum stress when driving under large scanning angle with long spring length. Meanwhile, maintains the efficient force transferring capability, (2) out-of-phase driving method: the proposed driving method could compensate the lack of bipolar driving range (-V~+V) of piezoelectric material and further enhance the performance of micromirror. Moreover, it could improve the stability of mirror when operating at huge scanning angle. Measurements demonstrate the proposed micromirror having 180-degrees optical scanning angle at 8.7 kHz scanning frequency under 40 V pp driving.