Novel Terraced Cavities Design on IR-Absorber Surface for CMOS-MEMS Thermoelectric Infrared Sensor

Conference paper

Yung-Chen Li, Yuan-Yuan Huang, You-An Lin, 梅鳳賴 and Wei-Leun Fang

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

25/06/2023

Abstract

Terraced Cavities;IR-Absorber;CMOS-MEMS;Thermoelectric Infrared Sensor

1 Record Views

Title: Novel Terraced Cavities Design on IR-Absorber Surface for CMOS-MEMS Thermoelectric Infrared Sensor
Creators - without role: Yung-Chen Li
Yuan-Yuan Huang
You-An Lin
梅鳳賴
Wei-Leun Fang
Identifiers: 9957774577106774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)