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Novel absorber membrane and thermocouple designs for CMOS-MEMS thermoelectric infrared sensor
Conference paper

Novel absorber membrane and thermocouple designs for CMOS-MEMS thermoelectric infrared sensor

Kai-Chieh Chang, Ya-Chu Lee, Chih-Ming Sun and Weileun Fang
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.1228-1231
02/2017
DOI: https://doi.org/10.1109/MEMSYS.2017.7863638
Appears in  keyword about Physics

Abstract

CMOS-MEMS Infrared sensor Thermoelectric Thermopile Electronic Optical and Magnetic Materials Condensed Matter Physics Mechanical Engineering Electrical and Electronic Engineering
This study designs and implements a thermoelectric IR sensor using TSMC 0.35μm 2P4M standard CMOS process. The novel design has three major concerns: heat conduction of the absorber membrane, distribution of the thermocouple, and etching release holes for post-CMOS process. Proposed design significantly increase the thermal resistance and responsivity of IR sensor. As compare with the reference design, the presented design could increase the responsivity for 6-fold at 25mtorr working pressure.

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