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Novel printing processes for MEMS Fabry-Pérot display pixel
Conference paper

Novel printing processes for MEMS Fabry-Pérot display pixel

Chengyao Lo, Olli-Heikki Huttunen, Jarno Petäjä, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita and Hiroshi Toshiyoshi
IDW '07 - Proceedings of the 14th International Display Workshops, Vol.4, pp.1968-1971
2007

Abstract

Roll-to-roll gravure printing and lamination were used for successful demonstration of MEMS (Micro Electro Mechanical System) Fabry-Pérot display pixel on flexible polyethylene naphthalate (PEN) film. New spacer structure design also lowered operation voltage for future low cost mass production.

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