- Title
- Numerical Analysis of Thermal-Bubble-Based Micromachined Accelerometer
- Creators - without role
- K. M. LiaoR. Chen - 國立清華大學工學院動力機械工程學系Bruce C. S. Chou
- Identifiers
- 9957772588706774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 2004 奈米工程暨微系統技術研討會 2004 奈米工程暨微系統技術研討會
Conference paper
Numerical Analysis of Thermal-Bubble-Based Micromachined Accelerometer
2004 奈米工程暨微系統技術研討會 2004 奈米工程暨微系統技術研討會
2004
Metrics
1 Record Views