- Title
- On-Chip Vacuum Generator Using Inductively-Actuated Soft Transformer
- Creators - without role
- Szu-Ying ChenCheng-Han TsaiChien-Chong Hong - 國立清華大學工學院動力機械工程學系Chie-Pein Chen
- Publication Details
- ISMM 2011 ISMM 2011
- Identifiers
- 9957773376406774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
On-Chip Vacuum Generator Using Inductively-Actuated Soft Transformer
ISMM 2011 ISMM 2011
2011
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