On-Wafer 3D E-beam Detector Cube by FinFET CMOS Technologie

Conference paper

Yi-Han Huang, Kuan-Chung Chiu, Yu-Jie Teng, Burn-Jeng Lin, Jiaw-Ren Shih, Faith Yuh, Yue-Der Chih, Jonathan Chang, 崇榮林 and Ya-Chin King

2023 International Conference on Solid State Devices and Materials

07/09/2023

Abstract

Wafer;3D;E-beam Detector;FinFET CMOS

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Title: On-Wafer 3D E-beam Detector Cube by FinFET CMOS Technologie
Creators - without role: Yi-Han Huang
Kuan-Chung Chiu
Yu-Jie Teng
Burn-Jeng Lin
Jiaw-Ren Shih
Faith Yuh
Yue-Der Chih
Jonathan Chang
崇榮林
Ya-Chin King
Publication Details: 2023 International Conference on Solid State Devices and Materials
Identifiers: 9957770276206774
Academic Unit: Institute of Electronics Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper