- 題名
- On-Wafer Polarity-Specific Response Plasma Charging Recorder with Fin-Coupling Structure by FinFET Technology
- 創作者：
- Han-Lin Huang (作者)〇-Wei Chang (作者)Yu-Der Chih (作者)Jonathan Chang (作者)Chrong-Jung Lin - 國立清華大學, 半導體研究學院King, Ya Chin (作者)
- 會議
- 2024 International Conference on Solid State Devices and Materials (Arcrea HIMEJI, Japan, 01/09/2024–04/09/2024)
- 學術資源類型
- 會議論文
- 語言
- 英語
會議論文
On-Wafer Polarity-Specific Response Plasma Charging Recorder with Fin-Coupling Structure by FinFET Technology
2024 International Conference on Solid State Devices and Materials (Arcrea HIMEJI, Japan, 01/09/2024–04/09/2024)
指標
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