Abstract
In this study, a three-step object was moved in-plan to different positions and determined the displacement by 3D DIC method. To monitor the out-of-plane displacement of the object during movement, a laser triangulation method was performed together with a typical 3D DIC. The laser triangulation setup consists of a laser source with a cylindrical lens mounted on the center of the camera-pair to generate a line pattern and then the discontinuous line patterns were then recorded by left- and right- cameras for step-height calculation. The measurement results reveal that there is displacement deviation introduced by viewing angle between camera and the object as the object is positioned at different locations. The experiment also shows that the deviation of 3D DIC determined in-plane displacement is small but the determined displacement is higher than the nominal displacement determined by a precision stage; in addition, out-of-plane displacements have been reported and cannot be ignored. In the final, a single camera model based on geometrical parameters of 3D DIC is proposed to correct the 3D DIC determined displacements; according to current results, the in-plane displacement of the 3-steps object can be tremendously reduced from 9.7% to 1.7%.