Abstract
The nonlinear effect caused by an AC driving voltage was investigated through ready-fabricated and -modeled micromachined cantilevers. The driving AC voltage would change the resonant frequency. In addition, the variation of the resonant frequency between the linear and nonlinear system increases when the driving voltage increases. In order to obtain an accurate relationship between the dynamic system and its resonant frequency, the nonlinear effect cannot be ignored especially when the driving voltage is large. The design of an electrostatically driven device would be improved and the Young's modulus of a microstructure would be extracted more precisely.