Abstract
Magnetic induction heating is a promising heating approach for MEMS processes and devices. This study has discussed the scale effect of induction heating for thin-film microstructures through the analytical and experimental means. The results show that the rising temperature varies with the in-plane surface area of microstructure and the relative permeability of thin-film materials. Moreover, the shape of microstructure also leads to the different of rising temperature. In applications, localized heating and temperature regions can be simultaneously achieved on substrate by applying a external high frequency magnetic field. © 2005 IEEE.