On-wafer electronic layer detectors array (ELDA) for e-beam imaging in advanced lithographic systems

Chien-Ping Wang; Bum Jeng Lin; Jiaw-Ren Shih; Yue-Der Chih; Jonathan Chang; Chrong Jung Lin; Ya-Chin King

doi:10.1109/VLSI-TSA51926.2021.9440046

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Conference paper

On-wafer electronic layer detectors array (ELDA) for e-beam imaging in advanced lithographic systems

Chien-Ping Wang, Bum Jeng Lin, Jiaw-Ren Shih, Yue-Der Chih, Jonathan Chang, Chrong Jung Lin and Ya-Chin King

VLSI-TSA 2021 - 2021 International Symposium on VLSI Technology, Systems and Applications, Proceedings, 9440046

04/2021

DOI: https://doi.org/10.1109/VLSI-TSA51926.2021.9440046

Abstract

Hardware and Architecture

Electrical and Electronic Engineering

Control and Optimization

A novel approach for electron beam (e-beam) detection is demonstrated in this work for the first time. The proposed on-wafer electronic layer detectors array (ELDA) features full CMOS-compatibility, fast response, and wide dynamic range, while the response of e-beam is recorded on the detectors array without power source, where data are read out during off-line testing, providing timely feedback of e-beam dosage distributions for IC processing lines for maintaining stable settings in advanced lithographic systems.

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Title: On-wafer electronic layer detectors array (ELDA) for e-beam imaging in advanced lithographic systems
Translated title: On-wafer electronic layer detectors array (ELDA) for e-beam imaging in advanced lithographic systems
Creators - without role: Chien-Ping Wang - National Tsing Hua University , Institute of Electronics Engineering
Bum Jeng Lin - National Tsing Hua University
Jiaw-Ren Shih - National Tsing Hua University , Institute of Electronics Engineering
Yue-Der Chih - Taiwan Semiconductor Manufacturing Company , Design Technology Division
Jonathan Chang - Taiwan Semiconductor Manufacturing Company (Taiwan)
Chrong Jung Lin - National Tsing Hua University
Ya-Chin King - National Tsing Hua University , Institute of Electronics Engineering
Publication Details: VLSI-TSA 2021 - 2021 International Symposium on VLSI Technology, Systems and Applications, Proceedings, 9440046
Identifiers: 9781665419345; 9957772321306774
Academic Unit: Institute of Electronics Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper

On-wafer electronic layer detectors array (ELDA) for e-beam imaging in advanced lithographic systems

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