Abstract
We report a novel open/close fluidic valve for nanochannels, exploiting smallness of extended nanospace (10-1000 nm) and tiny glass deformation. The working principle using deformation of rigid glass to open/close 100 nm channels, which has been difficult in conventional microchannels, was verified for the first time. This extended-nano fluidic valve without embedding any MEMS structure is a breakthrough in sophisticated fluidic control such as switching channels and integration of various unit operations (mixing, reaction, separation, etc.) to develop highly-integrated nanofluidic devices for various fields such as biology and energy engineering.