Optical Phase Shifters Based on Micro-Electro- Mechanical-System Actuated Deformable Silicon Wire Waveguides

Conference paper

Wei-Chao Chiu, Chun-Che Chang, Jiun-Ming Wu, Ming-Chang M. Lee and Jia- Min Shieh

Optics and Photonics Taiwan 2010

2010

Abstract

Micro-Electro- Mechanical-System;Silicon

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Title: Optical Phase Shifters Based on Micro-Electro- Mechanical-System Actuated Deformable Silicon Wire Waveguides
Creators - without role: Wei-Chao Chiu
Chun-Che Chang
Jiun-Ming Wu
Ming-Chang M. Lee - 國立清華大學電機資訊學院電機工程學系
Jia- Min Shieh
Identifiers: 9957769268306774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: Optics and Photonics Taiwan 2010