Abstract
The purpose of this paper is to use a hybrid structure and the electrostatic force to fabricate aspheric lenses with high Blu-Ray transmittance (95% at 405 nm). The hybrid structure is composed of Norland Optical Adhesive 63 (NOA63) (refractive index: 1.5802 at 405 nm) and BK-7 glass (refractive index: 1.5302). OSLO and CFD software was used to simulate the gradient of the electric field between the top and bottom electrodes and to produce the optimum bottom electrode design. Different electrode designs were also tested in order to optimize the morphology of the lens profile design. The resulting lenses have a clear aperture of approximately 0.92 mm, the maximum shape error is less than 0.18 %, and the spot size of the fabricated aspheric lenses can be controlled to approximately 0.504 μm. This technology can be used to fabricate lenses for applications in micro-optical systems. ©2010 IEEE.