Oxygen Doping on the Structure and Properties of Nanocrystalline TiNxOy Thin Films

Conference paper

S. Chiu, J.-H. Huang and G.-P. Yu

33th International Conference on Metallurgical Coatings and Thin Films 33th International Conference on Metallurgical Coatings and Thin Films

2006

Abstract

Oxygen Doping;Structure;Properties;Nanocrystalline TiNxOy Thin Films

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Title: Oxygen Doping on the Structure and Properties of Nanocrystalline TiNxOy Thin Films
Creators - without role: S. Chiu
J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
G.-P. Yu
Publication Details: 33th International Conference on Metallurgical Coatings and Thin Films 33th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957770613406774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper