- Title
- Patterned Film Effects on the Adhesion of Al/TiN Barrier using Fracture-Energy Based Finite Element Analysis
- Creators - without role
- C. C. Lee - 國立清華大學工學院動力機械工程學系C. S. WuB. F. HsiehS. T. Chang
- Publication Details
- International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2012) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2012)
- Identifiers
- 9957776770906774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Patterned Film Effects on the Adhesion of Al/TiN Barrier using Fracture-Energy Based Finite Element Analysis
International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2012) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2012)
2012
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