Abstract
The rapid fabrication possibility of functional sub-microstructures of microscopic periods is studied. The micro/nano periodic structures are engraved on the surface of metal templates, STAVAX, by using the femtosecond laser-induced periodic surface structure (FLIPSS) technique. The relationship between the structure period and the laser parameters such as laser power, scanning speed and repetition rate is revealed and discussed based on the physical phenomena. The results show great potential to greatly reduce the duration of the process.