Abstract
In this work, capacitively sensed squeeze-film pressure sensors are implemented in a silicon-based fabrication platform to facilitate multi-sensor integration. The squeeze-film pressure sensors do not require a mechanical membrane with a sealed reference cavity as in conventional devices. We study the performance of sensors with different plate sizes from 400×400 to 800×800 μm 2 , as well as with the same size but different natural frequencies. Measured sensitivity reaches 0.61 Hz/Pa for the 800-μm design. The important design trade-off between quality factor and sensitivity is also illustrated by the measured results.