Piezoelectricity of sub-20-nm nanoimprinted PVDF-TrFE nanograss

Chien-Chong Hong; Sheng-Uan Huang; Jiann Shieh; Szu-Hung Chen; Alan Chen

doi:10.1109/MEMSYS.2012.6170405

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Conference paper

Piezoelectricity of sub-20-nm nanoimprinted PVDF-TrFE nanograss

Chien-Chong Hong, Sheng-Uan Huang, Jiann Shieh, Szu-Hung Chen and Alan Chen

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.1336-1339

2012

DOI: https://doi.org/10.1109/MEMSYS.2012.6170405

Abstract

This paper composed a superior sub-20 nm ferroelectric PVDF-TrFE copolymer nanograss, and provided enhanced piezoelectricity on polymer surfaces. This study demonstrated sub-20 nm PVDF-TrFE nanograss structures that are nanoimprinted using a silicon nanograss mold in a single step. According to the PFM measurements, the maximum piezoelectricity of the single PVDF-TrFE nanopillar was 210.4 pm/V. The piezoelectricity of the developed PVDF-TrFE nanograss structures was 5.19 times larger than that of the PVDF-TrFE flat thin films. The developed technique is simple, economical, and easy to fabricate. © 2012 IEEE.

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Title: Piezoelectricity of sub-20-nm nanoimprinted PVDF-TrFE nanograss
Creators - without role: Chien-Chong Hong - National Tsing Hua University
Sheng-Uan Huang - National Tsing Hua University
Jiann Shieh - National United University
Szu-Hung Chen - National Institutes of Applied Research
Alan Chen - National Tsing Hua University
Identifiers: 9781467303248; 9957766476906774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.1336-1339

Piezoelectricity of sub-20-nm nanoimprinted PVDF-TrFE nanograss

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