Pneumatically-driven Micromachined Balloon Actuators and Their Applications on Micro Valves

Conference paper

Yu-Chong Tai, 國賓李, Yen-Heng Lin, Charles Grosjean and Yu-Hong Lin

The Sixteenth National Conference on Mechanical Engineering, The Chinese Society of Mechanical Engineers

1999

Abstract

Pneumatically-driven Micromachined Balloon Actuato

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Title: Pneumatically-driven Micromachined Balloon Actuators and Their Applications on Micro Valves
Translated title: Pneumatically-driven Micromachined Balloon Actuators and Their Applications on Micro Valves
Creators - without role: Yu-Chong Tai
國賓李
Yen-Heng Lin
Charles Grosjean
Yu-Hong Lin
Publication Details: The Sixteenth National Conference on Mechanical Engineering, The Chinese Society of Mechanical Engineers
Identifiers: 9957771126606774
Academic Unit: Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper