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Porous silicon based infrared photonic-sensor for high sensitive heavy metal ion detection
Conference paper

Porous silicon based infrared photonic-sensor for high sensitive heavy metal ion detection

Jian-Ren Lai, Jen-Kuei Wu, Minh-Hang Nguyen and Fan-Gang Tseng
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp.1476-1478
05/08/2015

Abstract

FTIR spectra heavy metal ion photonic sensor Porous silicon etching
In this paper we report the development of an ultrasensitive photonic sensor based on nanoporous silicon (NPS) substrate for heavy metal ions detection in a FTIR reflection system. A one-dimensional photonic crystal with disturbed Bragg reflector (DBR) fabricated by successive electrochemical etchings (ECE) is employed to enhance the reflected IR signals [1] [2]. This well-defined NPS nanostructures will be red shifted due to the increase in the refractive index of the Fe 3+ ion solution (1 mM). The Fe 3+ with difference concentration due to difference spectrum shift, and the average sensitivity is 22.3cm -1 /mM corresponding to a detection limit of 10.8 ppm.

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