Abstract
This study employed the four-point bending test (4-PBT) to measure the interfacial strength of pressure-sensitive adhesive (PSA)/SiN passivation stacked thin films. Finite element analysis (FEA) is combined with the J integral approach and the modified virtual crack closure technique to validate the results of 4-PBT. The FEA simulation results verify the measurement results. The stress status and energy release rate of the delaminated tip are also determined at different elevations of stacked thin films of 4-PBT specimens adjacent to the PSA/SiN interface. The crack in the PSA parallel to the foregoing interface with a slight span occurs on the fractured interface. This behavior is confirmed by observing the scanning electron micrographs of the specimens after 4-PBT.