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Preparation and Electrical Properties of Pb(Zr0.9Ti0.1)O3/Pb(Zr0.1Ti0.9)O3 Multilayer Thin Films by Dual-Gun RF Magnetron Sputtering
Conference paper

Preparation and Electrical Properties of Pb(Zr0.9Ti0.1)O3/Pb(Zr0.1Ti0.9)O3 Multilayer Thin Films by Dual-Gun RF Magnetron Sputtering

Chia-Han Lai, Shiao-Lan Lin, Su-Jien Lin and Shou-Yi Chang
Proceedings of the Symposium “Second International Symposium on Science and Technology of Dielectrics in Emerging Fields” of the 207th Meeting of The Electrochemical Society Proceedings of the Symposium “Second International Symposium on Science and Technology of Dielectrics in Emerging Fields” of the 207th Meeting of The Electrochemical Society
2005

Abstract

Ferroelectric thin films;memory device;multilayer thin films;sputter

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