Preparation of thick piezoelectric films on silicon substrate by laser lift-off technique

Conference paper

Nyan-Hua Tai, Yu-Mei Shen, Tong-Hsu and I-Nan Lin

IFFF IFFF

2002

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Title: Preparation of thick piezoelectric films on silicon substrate by laser lift-off technique
Creators - without role: Nyan-Hua Tai - 國立清華大學工學院材料科學工程學系
Yu-Mei Shen
Tong-Hsu
I-Nan Lin
Publication Details: IFFF IFFF
Identifiers: 9957768796006774
Academic Unit: Institute of Analytical and Environmental Sciences, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper