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Pressure Sensitive Ionic Gel-FETs Of Extremely High Sensitivity Over 2,200 kPa−1 Operated Under 2V
Conference paper

Pressure Sensitive Ionic Gel-FETs Of Extremely High Sensitivity Over 2,200 kPa−1 Operated Under 2V

Shunsuke Yamada, 隆昭 佐藤 and Hiroshi Toshiyoshi
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
06/2017

Abstract

Ionic liquid;metal oxide semiconductor;tactile sensor;MOSFET

Ionic gel is used for the first time on a ZnO field effect transistor (FET) to enhance the gate capacitance due to the electrical double layer, thereby developing an extremely sensitive tactile pressure sensor of 2,200 kPa−1, which is at least 10 times greater than the conventional reports.

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