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Processing of indium-tin-oxide for high speed metal-semiconductor-metal photodetectors
Conference paper

Processing of indium-tin-oxide for high speed metal-semiconductor-metal photodetectors

J. -W. Seo, A. A. Ketterson, D. G. Ballegeer, E. J. Roan, K. Y. Cheng and I. Adesida
1992 Electronic Materials Conference
1992

Abstract

indium-tin-oxide;metal-semiconductor-metal;photodetectors

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