Profile control for patterning glass microlens array by imprinting process

Conference paper

L. K. Chen, Y. M. Hung and C. K. Sung

23nd International Microprocesses and Nanotechnology Conference (MNC 2010) 23nd International Microprocesses and Nanotechnology Conference (MNC 2010)

2010

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Title: Profile control for patterning glass microlens array by imprinting process
Creators - without role: L. K. Chen
Y. M. Hung
C. K. Sung - 國立清華大學工學院動力機械工程學系
Identifiers: 9957776207906774
Academic Unit: National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 23nd International Microprocesses and Nanotechnology Conference (MNC 2010) 23nd International Microprocesses and Nanotechnology Conference (MNC 2010)