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Program/erase characteristics of twin poly-Si thin film transistors EEPROM with tri-gate nanowires structure
Conference paper

Program/erase characteristics of twin poly-Si thin film transistors EEPROM with tri-gate nanowires structure

Yung-Chun Wu, Po-Wen Su, Chin-Wei Chang and Min-Feng Hung
IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008, 5418421
2008

Abstract

Program/erase characteristics of twin Poly-Si Thin Film Transistors (TFTs) EEPROM utilizing tri-gate nanowires (NWs) was demonstrated. The NWs TFT has superior gate control due to its tri-gate structure leads to higher memory window and efficiency than single-channel (SC) one. The device different gate lengths characteristics and reliability were also addressed. The capacitance ratio of proposed device of 4:1 shows optimum value in P/E operation. The present work illustrates the possibility for future system-on-panel (SOP) and 3D Flash memory application.

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