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Progress in tunneling sensors
Conference paper

Progress in tunneling sensors

J. D. Grade, A. M. Barzilai, J. K. Reynolds, C. H. Liu, A. Partridge, T. W. Kenny, T. R. VanZandt, L. M. Miller and J. A. Podosek
Solid-State Sensors and Actuators Workshop Solid-State Sensors and Actuators Workshop
1996

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