- Title
- Recent developments of back side exposure technology for the fabrication of micro electrodes/needles array on flexible membranes
- Creators - without role
- Fu CHuang HYang WWang TChuang CY - 國立清華大學原子科學院生醫工程與環境科學系Yeh SShew B
- Identifiers
- 9957771173206774
- Academic Unit
- Institute of Analytical and Environmental Sciences, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology. Besancon, France, June 7-9, 2007 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology
Conference paper
Recent developments of back side exposure technology for the fabrication of micro electrodes/needles array on flexible membranes
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology. Besancon, France, June 7-9, 2007 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology
2007
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