Abstract
We developed a high-pressure diaphragm micropump comprised of a pumping chamber and two active valves. It was made from stainless-steel substrates with high durability and chemical resistance against alkali and organic solutions. Three piezoelectric stack actuators were utilized for controlling the pumping stroke and closing the active valves. The micropump could pump liquids into micro channels smoothly with low flow rates (0.6∼30 μL/min) under high-pressure conditions (up to 1.2 MPa) and was suitable for micro-chemical processes. © 2006 Society for Chemistry and Micro-Nano Systems.