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Reduced Roughness and Enhanced Mechanical Properties of Multilayered Diamond-Like Carbon Films by Periodical Cathodic Arc Deposition
Conference paper

Reduced Roughness and Enhanced Mechanical Properties of Multilayered Diamond-Like Carbon Films by Periodical Cathodic Arc Deposition

Ding-Shiang Wang, Shou-Yi Chang, Jin-Bao Wu, Ming-Sheng Leu and Hong-Jen Lai
Proceedings of TACT 2011 International Thin Films Conference Proceedings of TACT 2011 International Thin Films Conference, pp.120-121
2011

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