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Reliability of Interfacial Adhesion in a Multi-Level Interconnect Structure
Conference paper

Reliability of Interfacial Adhesion in a Multi-Level Interconnect Structure

C. C. Chiu, H. H. Chang, C. C. Lee, C. C. Hsia and K. N. Chiang
18th European Symposium Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2007) 18th European Symposium Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2007), pp.1506-1511
2007

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