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Repetition Nanoindentation-induced Deformation in GaN Epilayers on A-axis Sapphire Substrates
Conference paper

Repetition Nanoindentation-induced Deformation in GaN Epilayers on A-axis Sapphire Substrates

M. H. Lin, L. H. Peng, M. J. Wu, W. F. Wu and C. P. Chou
2011

Abstract

GaN Epilayers;A-axis Sapphire Substrates

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