- Title
- Research on Modeling Overlay Error & Sampling Strategy to Improve Yield
- Creators - without role
- Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系K. ChangC. Chen
- Publication Details
- the Chinese Institute of Industrial Engineers National Conference 1999 the Chinese Institute of Industrial Engineers National Conference 1999
- Identifiers
- 9957771467606774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Research on Modeling Overlay Error & Sampling Strategy to Improve Yield
the Chinese Institute of Industrial Engineers National Conference 1999 the Chinese Institute of Industrial Engineers National Conference 1999
1999
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1 Record Views