- Title
- Residual Stress Measurement for Textured Thin Films Using GIXRD
- Creators - without role
- 嘉宏 黃 - 國立清華大學原子科學院工程與系統科學系
- Publication Details
- 2005 Annual Meeting of Taiwan Association of Coatings and Thin Films Technology 2005 Annual Meeting of Taiwan Association of Coatings and Thin Films Technology
- Identifiers
- 9957768168906774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Residual Stress Measurement for Textured Thin Films Using GIXRD
2005 Annual Meeting of Taiwan Association of Coatings and Thin Films Technology 2005 Annual Meeting of Taiwan Association of Coatings and Thin Films Technology
2005
Related links
Metrics
1 Record Views