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Residual stress-free 100 MHz PZT-based concave diaphragm resonator for label-free protein-ligand biosensing with self-enhancing mechanism
Conference paper

Residual stress-free 100 MHz PZT-based concave diaphragm resonator for label-free protein-ligand biosensing with self-enhancing mechanism

Guo-Hua Feng and Zhi-Dain Lin
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp.1841-1844
2011
DOI: https://doi.org/10.1109/TRANSDUCERS.2011.5969304

Abstract

biosensing concave diaphragm resonator PZT Residual stress Hardware and Architecture Electrical and Electronic Engineering
This paper presents an innovative micromachined PZT-based concave diaphragm resonator for bio-sensing. The residual stress free acoustic transducer with strong electromechanical coupling piezoelectric material can be effectively operated at resonant and vibration modes. With conformal coated parylene as the interface of the transducer and bio-molecules, the prototype device demonstrates a high resolution (<1 ppm) and sensitivity (0.4 (ng/ml)/Hz) when detected at 2 <sup>nd</sup> harmonic resonant frequency (100 MHz). With 200-500 kHz self-vibration enhancement, the sensitivity can be even improved 15%. The developed transducer can be applied to many applications in biochemical related fields. © 2011 IEEE.

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