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Resistance-type Humidity Sensor Using CNTs Sensing Material with Al2O3 Conformal Coating for Enhanced Sensitivity
Conference paper

Resistance-type Humidity Sensor Using CNTs Sensing Material with Al2O3 Conformal Coating for Enhanced Sensitivity

Chien-Ya Hung, Wei-Lun Sung, Sih-Chieh Chen and Weileun Fang
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp.761-764
06/2019
DOI: https://doi.org/10.1109/TRANSDUCERS.2019.8808689
Appears in  keyword about Chemistry

Abstract

ALD process CNTs CNTs/Al2O3 composite Humidity sensor Process Chemistry and Technology Spectroscopy Electrical and Electronic Engineering Mechanical Engineering Electronic Optical and Magnetic Materials Control and Optimization Instrumentation
This study presents a resistance-type humidity sensor using carbon nanotubes (CNTs) with Al 2 O 3 coating. CNTs are typical materials for gas sensing and have the property resistance changing when absorbing moisture. Al 2 O 3 is an excellent material for moisture absorption. Thus, this study uses the serpentine CNTs design integrated with Al 2 O 3 conformal coating by Atom Layer Deposition (ALD) process to form a CNTs/Al 2 O 3 composite for enhanced sensitivity of a humidity sensor. Features of this approach: (1) ALD Al 2 O 3 to penetrate CNTs cluster and conformally coat on each CNTs surface; (2) High surface-to-volume ratio sensing structure offered by CNTs; (3) High moisture absorption capability offered by Al 2 O 3 coating. Measurement results show that the sensitivity of the humidity sensors with 300°C annealed CNTs/Al 2 O 3 composite is ~7-folds higher than that of bare-CNTs.

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