- Title
- Resultant Impacts of Stress Gradient CESL and Embedded S/D SiC Stressors on Nano-Scaled Si-Based Strained NMOSFETs
- Creators - without role
- C. C. Lee - 國立清華大學工學院動力機械工程學系P. C. Huang
- Publication Details
- TACT 2017 International Thin Films Conference TACT 2017 International Thin Films Conference
- Identifiers
- 9957771544206774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Resultant Impacts of Stress Gradient CESL and Embedded S/D SiC Stressors on Nano-Scaled Si-Based Strained NMOSFETs
TACT 2017 International Thin Films Conference TACT 2017 International Thin Films Conference
2017
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