- Title
- Rotation-Invariant Feature Matching for Defect Detection on Microscopic Image at Wafer Level
- Creators - without role
- 宏營 蔡
- Publication Details
- The 5th International Conference on Virtual Machining Process Technology (VMPT 2016)
- Identifiers
- 9957773828306774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Rotation-Invariant Feature Matching for Defect Detection on Microscopic Image at Wafer Level
The 5th International Conference on Virtual Machining Process Technology (VMPT 2016)
2016
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