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Round robin study of chlorine, sulfur and carbon in copper films from Taiwan SIMS users
Conference paper   Peer reviewed

Round robin study of chlorine, sulfur and carbon in copper films from Taiwan SIMS users

C.Y. Chen, Y.C. Ling, J.F. Hwang, J.H. Lee, M.L. Wen, M.C. Hwang, G.C. Lin and R.C. Deng
Applied Surface Science, Vol.203-204, pp.461-464
15/01/2003
DOI: https://doi.org/10.1016/S0169-4332(02)00761-4

Abstract

Carbon Chlorine Copper film Relative sensitivity factors SIMS Sulfur
The round robin study of reference standards of 35 Cl, 32 S and 12 C implanted into Cu films using five SIMS instruments from Taiwan SIMS users was attempted. Significant differences in RSFs but similarity in maximum peak concentration among different instruments was observed. For 35 Cl, 32 S and 12 C measured using Cameca ims-6f, the RSF is 3.67E+19, 5.44E+20, 4.24E+21, the detection limit is 2.5E+16, 3.17E+16, 2.34E+18, and the dynamic range is 8.11E+3, 2.22E+4, 2.3E+1, respectively. The exchangeable use of RSF is recommended among model-specific instruments. © 2002 Elsevier Science B.V. All rights reserved.

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