- Title
- STI Geometrical Influence of Recessed Surface on Array-Type Arrangements of Nano-Scaled Devices Strained by CESL and Ge-based Stressors
- Creators - without role
- C. C. Lee - 國立清華大學工學院動力機械工程學系S. W. ChengP. C. Huang
- Publication Details
- TACT 2015 International Thin Films Conference TACT 2015 International Thin Films Conference
- Identifiers
- 9957772484506774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
STI Geometrical Influence of Recessed Surface on Array-Type Arrangements of Nano-Scaled Devices Strained by CESL and Ge-based Stressors
TACT 2015 International Thin Films Conference TACT 2015 International Thin Films Conference
2015
Metrics
1 Record Views