Abstract
We report the selective growth of carbon nanotubes (CNTs) on nickel oxide catalytic templates created by atomic force microscope nano-oxidation. By applying anegative bias to the tip, nickel oxide patterns are first produced on a nickel film by the process of nano-oxidation. In a subsequent wet etching, the unoxidized nickel is etched away whereas the nickel oxide is preserved. Nickel oxide nanostructures with sizes down to 40 nm are successfully fabricated. Vertically aligned multi-wall CNTs are then selectively grown on the oxide nanostructures by inductively coupled plasma chemical vapor deposition. The growth of single CNTs with variable diameters on oxide nanodots has also been realized.