Self-assembled molecular layers (SAMs) in various terminal groups to assess the effectiveness of the diffusion barrier at Ru/SAM/Si

Conference paper

2023 Materials Research Society-Taiwan International Conference (2023 MRSTIC)

11/2023

Abstract

SAMs;Ru/SAM/Si

1 Record Views

Title: Self-assembled molecular layers (SAMs) in various terminal groups to assess the effectiveness of the diffusion barrier at Ru/SAM/Si
Creators - without role: 佩雲龔
Publication Details: 2023 Materials Research Society-Taiwan International Conference (2023 MRSTIC)
Identifiers: 9957771024506774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper