Silicon microresonators with MEMS-actuated tunable couplers

Ming C. Wu; Jin Yao; Ming-Chang Lee

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Conference paper

Silicon microresonators with MEMS-actuated tunable couplers

Ming C. Wu, Jin Yao and Ming-Chang Lee

IEEE International Conference on Group IV Photonics GFP, pp.43-45

2007

Abstract

We review the current state-of-the-art of tunable microdisk/microtoroidal resonators with MEMS-actuated couplers. They are key enabling elements of many wavelength-division-multiplexing switches and tunable filters. The performance of dynamic add-drop and bandwidth-tunable filters will be discussed. ©2007 IEEE.

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Title: Silicon microresonators with MEMS-actuated tunable couplers
Creators - without role: Ming C. Wu - Berkeley Sensor and Actuator Center , Dept. Electrical Engineering and Computer Sciences , University of California
Jin Yao - Berkeley Sensor and Actuator Center , Dept. Electrical Engineering and Computer Sciences , University of California
Ming-Chang Lee - Institute of Photonics Technologies , Dept. Electrical Engineering , National Tsing Hua University
Publication Details: IEEE International Conference on Group IV Photonics GFP, pp.43-45
Identifiers: 9957766118406774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper

Silicon microresonators with MEMS-actuated tunable couplers

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