Abstract
A single crystalline silicon microtoroidal resonator with integrated MEMS tunable optical coupler is demonstrated for the first time. The coupling coefficient is continuously tuned from almost zero up to 13.3%. © 2006 IEEE.
- Title
- Silicon microtoroidal resonators with integrated MEMS tunable optical coupler
- Creators - without role
- Jin Yao - Berkeley Sensor and Actuator Center (BSAC) , Dept. Electrical Engineering and Computer Sciences , University of CaliforniaDavid Leuenberger - Berkeley Sensor and Actuator Center (BSAC) , Dept. Electrical Engineering and Computer Sciences , University of CaliforniaMing-Chang M. Lee - Dept. Electrical Engineering , Institute of Photonics Technologies , National Tsing Hua UniversityMing C. Wu - Berkeley Sensor and Actuator Center (BSAC) , Dept. Electrical Engineering and Computer Sciences , University of California
- Publication Details
- IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, pp.17-18
- Identifiers
- 078039562X; 9780780395626; 9957776682006774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper