Silicon-rich Dielectrics anneal with In-Situ Electrical Field in silicon nanocrystal formation

Conference paper

Chih-Kuo Tseng, Chao-Kei Wang, Jiun-Ru Huang, Hau-Wei Hung, Jia-Min Shieh and Ming-Chang Lee

The 16th symposium on Nanodevice Technology

2009

Abstract

Silicon;Dielectrics;nanocrystal

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Title: Silicon-rich Dielectrics anneal with In-Situ Electrical Field in silicon nanocrystal formation
Creators - without role: Chih-Kuo Tseng
Chao-Kei Wang
Jiun-Ru Huang
Hau-Wei Hung
Jia-Min Shieh
Ming-Chang Lee - 國立清華大學電機資訊學院電機工程學系
Publication Details: The 16th symposium on Nanodevice Technology
Identifiers: 9957771398306774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper